Nucleation growth of thin sputtered zinc films
Identifieur interne : 001683 ( France/Analysis ); précédent : 001682; suivant : 001684Nucleation growth of thin sputtered zinc films
Auteurs : C. Tellier [France] ; A. Tosser [France]Source :
- Thin Solid Films [ 0040-6090 ] ; 1976.
Abstract
Data on the resistance of thin sputtered zinc films before and after thermal aging suggest the existence of two layers: the lower layer, about 140 Å thick, corresponding to the first critical thickness, is strongly modified by aging, and electronic conduction occurs by reflection at grain boundaries (M-S model); the top layer is slightly modified by aging, and conduction occurs by reflection at grain boundaries and on the top surface. The phenomena are quite consistent with the theory of the nucleation growth of sputtered films.
Url:
DOI: 10.1016/0040-6090(76)90241-8
Affiliations:
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ISTEX:BC71301D38D1A29A722ABE8EF1DB973EEB2034D0Le document en format XML
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<front><div type="abstract" xml:lang="en">Data on the resistance of thin sputtered zinc films before and after thermal aging suggest the existence of two layers: the lower layer, about 140 Å thick, corresponding to the first critical thickness, is strongly modified by aging, and electronic conduction occurs by reflection at grain boundaries (M-S model); the top layer is slightly modified by aging, and conduction occurs by reflection at grain boundaries and on the top surface. The phenomena are quite consistent with the theory of the nucleation growth of sputtered films.</div>
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